Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7097947 | Method for correcting local loading effects in the etching of photomasks | Gerd Ballhorn, Jens Schneider | 2006-08-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7097947 | Method for correcting local loading effects in the etching of photomasks | Gerd Ballhorn, Jens Schneider | 2006-08-29 |