Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276624 | Semiconductor device power metallization layer with stress-relieving heat sink structure | Michael Nelhiebel, Olaf Heitzsch, Jakob Kriz, Sven Lanzerstorfer, Rainer Pelzer +3 more | 2022-03-15 |
| 10331036 | Exposure mask, exposure apparatus and method for calibrating an exposure apparatus | Markus Dankelmann, Uwe Winkler | 2019-06-25 |