Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7644389 | Method for producing a mask for the lithographic projection of a pattern onto a substrate | Mario Hennig, Rainer Pforr | 2010-01-05 |
| 6972832 | Method of grounding a photoblank to a holding device | Gernot Gödl, Andreas Oelmann, Wolfgang Besenböck, Alois Reiter | 2005-12-06 |