Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972832 | Method of grounding a photoblank to a holding device | Gernot Gödl, Andreas Oelmann, Gerd Unger, Alois Reiter | 2005-12-06 |
| 6214496 | Method for reducing corner rounding in mask fabrication utilizing elliptical energy beam | Enio Luiz Carpio | 2001-04-10 |