Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6238279 | Magnetic filtration for slurry used in chemical mechanical polishing of semiconductor wafers | Rurng-Chien Chang, Champion Yi | 2001-05-29 |
| 6153116 | Method of detecting end point and monitoring uniformity in chemical-mechanical polishing operation | Ming-Cheng Yang, Cheng-Sung Huang, Champion Yi | 2000-11-28 |