Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6238279 | Magnetic filtration for slurry used in chemical mechanical polishing of semiconductor wafers | Feng-Yeu Shau, Champion Yi | 2001-05-29 |
| 6227949 | Two-slurry CMP polishing with different particle size abrasives | Champion Yi, Jiun-Fang Wang | 2001-05-08 |