Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12064779 | Liquid-dispensing system, apparatus and method | Karl Pilch, Herbert Priess | 2024-08-20 |
| 12018369 | Substrate processing chamber and process gas flow deflector for use in the processing chamber | Matthias Kuenle, Olaf Fiedler, Thomas Huber, Mathias Male | 2024-06-25 |
| 11149351 | Apparatus and method for chemical vapor deposition process for semiconductor substrates | Matthias Kuenle, Johannes Baumgartl, Manfred Engelhardt, Francisco Javier Santos Rodriguez, Olaf Storbeck | 2021-10-19 |
| 10906057 | Liquid-dispensing system, apparatus and method | Karl Pilch, Herbert Priess | 2021-02-02 |