Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12018369 | Substrate processing chamber and process gas flow deflector for use in the processing chamber | Matthias Kuenle, Olaf Fiedler, Thomas Huber, Christian Illemann | 2024-06-25 |
| 10186445 | Wafer releasing | Christian Maier, Philemon Schweizer, Manfred Bucher, Thomas Steiner | 2019-01-22 |
| 9410249 | Wafer releasing | Christian Maier, Philemon Schweizer, Manfred Bucher, Thomas Steiner | 2016-08-09 |