Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12064779 | Liquid-dispensing system, apparatus and method | Christian Illemann, Herbert Priess | 2024-08-20 |
| 10906057 | Liquid-dispensing system, apparatus and method | Christian Illemann, Herbert Priess | 2021-02-02 |
| 10373855 | Method for processing a wafer and method for processing a carrier | — | 2019-08-06 |
| 10246782 | Methods for etching a workpiece, an apparatus configured to etch a workpiece, and a non-transitory computer readable medium | Sonja Muringer | 2019-04-02 |
| 9688569 | Etching apparatus and method | — | 2017-06-27 |
| 9433962 | Application of fluids to substrates | Hans Leitner, Michael Kalin | 2016-09-06 |
| 9248466 | Application of fluids to substrates | Hans Leitner, Michael Kalin | 2016-02-02 |
| 9145332 | Etching apparatus and method | — | 2015-09-29 |
| 9079210 | Methods for etching a workpiece, an apparatus configured to etch a workpiece, and a non-transitory computer readable medium | Sonja Muringer | 2015-07-14 |