Issued Patents All Time
Showing 25 most recent of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411502 | Flow control system, method, and apparatus | Marshall B. Grill, Norman L. Batchelor, II, Sean Penley, Michael Maeder, Patti J. Mudd +4 more | 2025-09-09 |
| 12259739 | Advanced pressure based mass flow controllers and diagnostics | Arun Nagarajan, Mohamed Saleem | 2025-03-25 |
| 12228435 | Flow control system, method, and apparatus | Patti J. Mudd | 2025-02-18 |
| 12181328 | Flow through pressure sensor structured to remove dead volume | Mohamed Saleem, Arun Nagarajan, Andrew J. Staudt | 2024-12-31 |
| 11815920 | Flow control system, method, and apparatus | Sean Penley, Michael Maeder, Patti J. Mudd | 2023-11-14 |
| 11669111 | Valve assembly and system used to control flow rate of a fluid | Mohamed Saleem, Arun Nagarajan, Hossein Ghapanchizadeh | 2023-06-06 |
| 11424148 | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same | Sean Penley, Michael Maeder, Patti J. Mudd | 2022-08-23 |
| 11144075 | Flow control system, method, and apparatus | Marshall B. Grill, Norman L. Batchelor, II, Sean Penley, Michael Maeder, Patti J. Mudd | 2021-10-12 |
| 11003198 | Controlled delivery of process gas using a remote pressure measurement device | Patti J. Mudd | 2021-05-11 |
| 10782165 | Flow control system, method, and apparatus | Patti J. Mudd | 2020-09-22 |
| 10782710 | Flow control system, method, and apparatus | Marshall B. Grill, Norman L. Batchelor, II | 2020-09-22 |
| 10704936 | Flow rate characteristic function identification method, flow rate characteristic function identification device, storage medium storing flow rate characteristic function identification program, and flow rate sensor or flow rate control device using them | William Wylie White, Michael Alex Kramer, Tadahiro Yasuda | 2020-07-07 |
| 10679880 | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same | Sean Penley, Michael Maeder, Patti J. Mudd | 2020-06-09 |
| 10497542 | Flow control showerhead with integrated flow restrictors for improved gas delivery to a semiconductor process | Patti J. Mudd | 2019-12-03 |
| 10303189 | Flow control system, method, and apparatus | Marshall B. Grill, Norman L. Batchelor, II | 2019-05-28 |
| 10036662 | Flow rate calculation system and flow rate calculation method | William Wylie White | 2018-07-31 |
| 9976887 | Wider dynamic accuracy range for gas delivery devices | Patti J. Mudd | 2018-05-22 |
| 9958302 | Flow control system, method, and apparatus | Patti J. Mudd | 2018-05-01 |
| 9690301 | Pressure based mass flow controller | Patti J. Mudd | 2017-06-27 |
| 9448564 | Gas delivery system for outputting fast square waves of process gas during semiconductor processing | Patti J. Mudd | 2016-09-20 |
| 9188989 | Flow node to deliver process gas using a remote pressure measurement device | Patti J. Mudd | 2015-11-17 |
| 8770215 | Low flow injector to deliver a low flow of gas to a remote location | Patti J. Mudd | 2014-07-08 |
| 8744784 | Diagnostic mechanism in differential pressure type mass flow controller | Tadahiro Yasuda, Kazuhiro Matsuura, Kentaro Nagai | 2014-06-03 |
| 8376312 | Flow restrictor | William Wylie White, Virginia Miller, Christopher B. Davis, Kimura Miyoshi, Tadahiro Yasuda | 2013-02-19 |
| 7431045 | Flow restrictor | William Wylie White, Virginia Miller, Christopher B. Davis, Kimura Miyoshi, Tadahiro Yasuda | 2008-10-07 |