Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411502 | Flow control system, method, and apparatus | Daniel T. Mudd, Marshall B. Grill, Norman L. Batchelor, II, Sean Penley, Michael Maeder +4 more | 2025-09-09 |
| 12228435 | Flow control system, method, and apparatus | Daniel T. Mudd | 2025-02-18 |
| 11815920 | Flow control system, method, and apparatus | Daniel T. Mudd, Sean Penley, Michael Maeder | 2023-11-14 |
| 11424148 | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same | Sean Penley, Michael Maeder, Daniel T. Mudd | 2022-08-23 |
| 11144075 | Flow control system, method, and apparatus | Daniel T. Mudd, Marshall B. Grill, Norman L. Batchelor, II, Sean Penley, Michael Maeder | 2021-10-12 |
| 11003198 | Controlled delivery of process gas using a remote pressure measurement device | Daniel T. Mudd | 2021-05-11 |
| 10782165 | Flow control system, method, and apparatus | Daniel T. Mudd | 2020-09-22 |
| 10679880 | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same | Sean Penley, Michael Maeder, Daniel T. Mudd | 2020-06-09 |
| 10497542 | Flow control showerhead with integrated flow restrictors for improved gas delivery to a semiconductor process | Daniel T. Mudd | 2019-12-03 |
| 9976887 | Wider dynamic accuracy range for gas delivery devices | Daniel T. Mudd | 2018-05-22 |
| 9958302 | Flow control system, method, and apparatus | Daniel T. Mudd | 2018-05-01 |
| 9690301 | Pressure based mass flow controller | Daniel T. Mudd | 2017-06-27 |
| 9448564 | Gas delivery system for outputting fast square waves of process gas during semiconductor processing | Daniel T. Mudd | 2016-09-20 |
| 9188989 | Flow node to deliver process gas using a remote pressure measurement device | Daniel T. Mudd | 2015-11-17 |
| 8770215 | Low flow injector to deliver a low flow of gas to a remote location | Daniel T. Mudd | 2014-07-08 |