| 12411502 |
Flow control system, method, and apparatus |
Daniel T. Mudd, Marshall B. Grill, Norman L. Batchelor, II, Sean Penley, Michael Maeder +4 more |
2025-09-09 |
| 12228435 |
Flow control system, method, and apparatus |
Daniel T. Mudd |
2025-02-18 |
| 11815920 |
Flow control system, method, and apparatus |
Daniel T. Mudd, Sean Penley, Michael Maeder |
2023-11-14 |
| 11424148 |
Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
Sean Penley, Michael Maeder, Daniel T. Mudd |
2022-08-23 |
| 11144075 |
Flow control system, method, and apparatus |
Daniel T. Mudd, Marshall B. Grill, Norman L. Batchelor, II, Sean Penley, Michael Maeder |
2021-10-12 |
| 11003198 |
Controlled delivery of process gas using a remote pressure measurement device |
Daniel T. Mudd |
2021-05-11 |
| 10782165 |
Flow control system, method, and apparatus |
Daniel T. Mudd |
2020-09-22 |
| 10679880 |
Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
Sean Penley, Michael Maeder, Daniel T. Mudd |
2020-06-09 |
| 10497542 |
Flow control showerhead with integrated flow restrictors for improved gas delivery to a semiconductor process |
Daniel T. Mudd |
2019-12-03 |
| 9976887 |
Wider dynamic accuracy range for gas delivery devices |
Daniel T. Mudd |
2018-05-22 |
| 9958302 |
Flow control system, method, and apparatus |
Daniel T. Mudd |
2018-05-01 |
| 9690301 |
Pressure based mass flow controller |
Daniel T. Mudd |
2017-06-27 |
| 9448564 |
Gas delivery system for outputting fast square waves of process gas during semiconductor processing |
Daniel T. Mudd |
2016-09-20 |
| 9188989 |
Flow node to deliver process gas using a remote pressure measurement device |
Daniel T. Mudd |
2015-11-17 |
| 8770215 |
Low flow injector to deliver a low flow of gas to a remote location |
Daniel T. Mudd |
2014-07-08 |