Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399516 | Flow ratio controller system operating in alternative control modes | Patrick Lowery, Maximilian Martin Gundlach, Andrew Price | 2025-08-26 |
| 12327750 | Electrostatic chuck device, pressure calculation method and program | Lei Ma, Andrew Price | 2025-06-10 |
| 12306644 | Hybrid flow ratio controller system with channels for flow ratio control, flow rate or pressure control, and overflow control | Maximilian Martin Gundlach, Patrick Lowery | 2025-05-20 |
| 11867308 | Piezoelectric actuator and fluid control valve | Shigeyuki Hayashi | 2024-01-09 |
| 11686603 | Pressure type flowmeter and fluid control device | Hiroshi Horiguchi, Kentaro Nagai | 2023-06-27 |
| 11193509 | Fluid control valve and fluid control device | John Dick | 2021-12-07 |
| 11187343 | Fluid control valve and fluid control device | — | 2021-11-30 |
| 11162176 | Fluid control apparatus, fluid control system, fluid control method, and program recording medium | Thomas Hoke | 2021-11-02 |
| 11036242 | Calibration data generation apparatus, calibration data generation method, and flow rate control device | Thomas Hoke, Patrick Lowery, Bill White, John Dick, Tomohiro Yoshida | 2021-06-15 |
| 10996689 | Flow rate ratio control device with flow velocity control mode | Patrick Lowery, William Wylie White, Brian James Ebert, Maximilian Martin Gundlach, John Dick | 2021-05-04 |
| 10969019 | Fluid control device, recording medium recorded with control program, and control method | Thomas Hoke, Ryan Owens, Maximilian Martin Gundlach, Patrick Lowery, John Dick +1 more | 2021-04-06 |
| 10704936 | Flow rate characteristic function identification method, flow rate characteristic function identification device, storage medium storing flow rate characteristic function identification program, and flow rate sensor or flow rate control device using them | Daniel T. Mudd, William Wylie White, Michael Alex Kramer | 2020-07-07 |
| 10545514 | Flow rate control apparatus, flow rate control method, and program recording medium | Bill White, Patrick Lowery, Maximilian Martin Gundlach, Ryan Owens | 2020-01-28 |
| 10114385 | Fluid control valve | Shigeyuki Hayashi | 2018-10-30 |
| 9896768 | Sealing member and method of manufacturing the same | Masayuki Nagasawa, Shigeyuki Hayashi | 2018-02-20 |
| 9795936 | Fluid mixing element | Shigeyuki Hayashi | 2017-10-24 |
| 9766634 | Fluid mechanism, support member constituting fluid mechanism and fluid control system | — | 2017-09-19 |
| 9746102 | Fluid control valve | Shigeyuki Hayashi, Nobuyuki Kannan | 2017-08-29 |
| 9719829 | Fluid measurement system | Kazuhiro Matsuura, Hiroshi Takakura, Yukimasa Furukawa | 2017-08-01 |
| 9690302 | Fluid resistance device | — | 2017-06-27 |
| 9657860 | Valve element and fluid control valve | Shigeyuki Hayashi, Kazuya Ohsa | 2017-05-23 |
| 9494946 | Flow rate control device | — | 2016-11-15 |
| 9285079 | Gas supply system | Yuji Yamaguchi | 2016-03-15 |
| 9188990 | Fluid mechanism, support member constituting fluid mechanism and fluid control system | — | 2015-11-17 |
| 8910656 | Fluid controller | — | 2014-12-16 |