Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5770948 | Rotary signal coupling for chemical mechanical polishing endpoint detection with a strasbaugh tool | Leping Li, Steven G. Barbee, Arnold Halperin, Richard Ruggiero | 1998-06-23 |