Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903023 | In-situ plasma etch for TERA hard mask materials | Richard S. Wise, Sadanand V. Deshpande, Wendy Yan, Arpan Mahorowala | 2005-06-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903023 | In-situ plasma etch for TERA hard mask materials | Richard S. Wise, Sadanand V. Deshpande, Wendy Yan, Arpan Mahorowala | 2005-06-07 |