Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6146517 | Integrated circuits with copper metallization for interconnections | — | 2000-11-14 |
| 6057236 | CVD/PVD method of filling structures using discontinuous CVD AL liner | Larry Clevenger, Roy Iggulden, Stefan Weber | 2000-05-02 |
| 5989633 | Process for overcoming CVD aluminum selectivity loss with warm PVD aluminum | — | 1999-11-23 |
| 5872694 | Method and apparatus for determining wafer warpage for optimized electrostatic chuck clamping voltage | Darryl D. Restaino | 1999-02-16 |