| 8368124 |
Electromechanical devices having etch barrier layers |
Mark W. Miles, Clarence Chui, Manish Kothari |
2013-02-05 |
| 8278726 |
Controlling electromechanical behavior of structures within a microelectromechanical systems device |
Mark W. Miles, Clarence Chui, Manish Kothari, Ming-Hau Tung |
2012-10-02 |
| 7781850 |
Controlling electromechanical behavior of structures within a microelectromechanical systems device |
Mark W. Miles, Clarence Chui, Manish Kothari, Ming-Hau Tung |
2010-08-24 |
| 7704772 |
Method of manufacture for microelectromechanical devices |
Ming-Hau Tung, Brian J. Gally, Manish Kothari, Clarence Chui |
2010-04-27 |
| 7580172 |
MEMS device and interconnects for same |
Alan G. Lewis, Manish Kothari, Teruo Sasagawa, Ming-Hau Tung, Gregory D. U'Ren +1 more |
2009-08-25 |
| 7550794 |
Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer |
Mark W. Miles, Clarence Chui, Manish Kothari |
2009-06-23 |
| 7476327 |
Method of manufacture for microelectromechanical devices |
Ming-Hau Tung, Brian J. Gally, Manish Kothari, Clarence Chui |
2009-01-13 |
| 6545295 |
Transistor having ammonia free nitride between its gate electrode and gate insulation layers |
Peter M. Fryer, Jun-Hyung Souk |
2003-04-08 |
| 6420282 |
Passivation of copper with ammonia-free silicon nitride and application to TFT/LCD |
Peter M. Fryer, Jun-Hyung Souk |
2002-07-16 |
| 6165917 |
Passivation of copper with ammonia-free silicon nitride and application to TFT/LCD |
Peter M. Fryer, Jun-Hyung Souk |
2000-12-26 |
| 5831283 |
Passivation of copper with ammonia-free silicon nitride and application to TFT/LCD |
Peter M. Fryer, Jun-Hyung Souk |
1998-11-03 |
| 5242530 |
Pulsed gas plasma-enhanced chemical vapor deposition of silicon |
John J. Boland, Gregory N. Parsons |
1993-09-07 |
| 5086321 |
Unpinned oxide-compound semiconductor structures and method of forming same |
Sandip Tiwari, Steven L. Wright |
1992-02-04 |
| 5068124 |
Method for depositing high quality silicon dioxide by PECVD |
Elaine Tierney |
1991-11-26 |
| 4998152 |
Thin film transistor |
Rajiv V. Joshi |
1991-03-05 |
| 4987095 |
Method of making unpinned oxide-compound semiconductor structures |
Sandip Tiwari, Steven L. Wright |
1991-01-22 |
