Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8368124 | Electromechanical devices having etch barrier layers | Mark W. Miles, Clarence Chui, Manish Kothari | 2013-02-05 |
| 8278726 | Controlling electromechanical behavior of structures within a microelectromechanical systems device | Mark W. Miles, Clarence Chui, Manish Kothari, Ming-Hau Tung | 2012-10-02 |
| 7781850 | Controlling electromechanical behavior of structures within a microelectromechanical systems device | Mark W. Miles, Clarence Chui, Manish Kothari, Ming-Hau Tung | 2010-08-24 |
| 7704772 | Method of manufacture for microelectromechanical devices | Ming-Hau Tung, Brian J. Gally, Manish Kothari, Clarence Chui | 2010-04-27 |
| 7580172 | MEMS device and interconnects for same | Alan G. Lewis, Manish Kothari, Teruo Sasagawa, Ming-Hau Tung, Gregory D. U'Ren +1 more | 2009-08-25 |
| 7550794 | Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer | Mark W. Miles, Clarence Chui, Manish Kothari | 2009-06-23 |
| 7476327 | Method of manufacture for microelectromechanical devices | Ming-Hau Tung, Brian J. Gally, Manish Kothari, Clarence Chui | 2009-01-13 |
| 6545295 | Transistor having ammonia free nitride between its gate electrode and gate insulation layers | Peter M. Fryer, Jun-Hyung Souk | 2003-04-08 |
| 6420282 | Passivation of copper with ammonia-free silicon nitride and application to TFT/LCD | Peter M. Fryer, Jun-Hyung Souk | 2002-07-16 |
| 6165917 | Passivation of copper with ammonia-free silicon nitride and application to TFT/LCD | Peter M. Fryer, Jun-Hyung Souk | 2000-12-26 |
| 5831283 | Passivation of copper with ammonia-free silicon nitride and application to TFT/LCD | Peter M. Fryer, Jun-Hyung Souk | 1998-11-03 |
| 5242530 | Pulsed gas plasma-enhanced chemical vapor deposition of silicon | John J. Boland, Gregory N. Parsons | 1993-09-07 |
| 5086321 | Unpinned oxide-compound semiconductor structures and method of forming same | Sandip Tiwari, Steven L. Wright | 1992-02-04 |
| 5068124 | Method for depositing high quality silicon dioxide by PECVD | Elaine Tierney | 1991-11-26 |
| 4998152 | Thin film transistor | Rajiv V. Joshi | 1991-03-05 |
| 4987095 | Method of making unpinned oxide-compound semiconductor structures | Sandip Tiwari, Steven L. Wright | 1991-01-22 |