Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8634063 | Wafer with design printed outside active region and spaced by design tolerance of reticle blind | Robert T. Froebel, Paul D. Sonntag | 2014-01-21 |
| 7656505 | Apparatus to easily measure reticle blind positioning with an exposure apparatus | Robert T. Froebel, Paul D. Sonntag | 2010-02-02 |
| 7005221 | Method and apparatus to easily measure reticle blind positioning with an exposure apparatus | Robert T. Froebel, Paul D. Sonntag | 2006-02-28 |
| 5973771 | Pupil imaging reticle for photo steppers | Michael S. Hibbs, Dean C. Humphrey, Barbara Bates Peck | 1999-10-26 |