Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6284666 | Method of reducing RIE lag for deep trench silicon etching | Munir D. Naeem, Gangadhara S. Mathad, Byeong Y. Kim, Stephan Kudelka, Brian Lee +3 more | 2001-09-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6284666 | Method of reducing RIE lag for deep trench silicon etching | Munir D. Naeem, Gangadhara S. Mathad, Byeong Y. Kim, Stephan Kudelka, Brian Lee +3 more | 2001-09-04 |