Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261044 | Multi-layer hardmask for defect reduction in EUV patterning | Bhaskar Nagabhirava, Phillip Friddle, Jennifer Church, Dominik Metzler, Nelson Felix | 2025-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261044 | Multi-layer hardmask for defect reduction in EUV patterning | Bhaskar Nagabhirava, Phillip Friddle, Jennifer Church, Dominik Metzler, Nelson Felix | 2025-03-25 |