Issued Patents All Time
Showing 1–25 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8507184 | Method of manufacturing semiconductor device | — | 2013-08-13 |
| 8053312 | Semiconductor device and method for fabricating the same | Dong-Heok Park | 2011-11-08 |
| 8022409 | Semiconductor device with omega gate and method for fabricating a semiconductor device | — | 2011-09-20 |
| 7875515 | Method for manufacturing capacitor of semiconductor device | Hyoung Ryeun Kim | 2011-01-25 |
| 7755149 | Photo mask and semiconductor device fabricated using the same | — | 2010-07-13 |
| 7736843 | Method for manufacturing a semiconductor device | — | 2010-06-15 |
| 7709186 | Method for exposing photoresist film of semiconductor device | — | 2010-05-04 |
| 7368226 | Method for forming fine patterns of semiconductor device | — | 2008-05-06 |
| 7276410 | Semiconductor device with omega gate and method for fabricating a semiconductor device | — | 2007-10-02 |
| 6864590 | Alignment mark for aligning wafer of semiconductor device | Hyeong Soo Kim | 2005-03-08 |
| 6836322 | Particle inspection device and inspection method using the same | — | 2004-12-28 |
| 6821690 | Photomask and method for forming micro patterns of semiconductor device using the same | — | 2004-11-23 |
| 6569605 | Photomask and method for forming micro patterns of semiconductor device using the same | — | 2003-05-27 |
| 6329106 | Repair method for phase shift mask in semiconductor device | Yong Chul Shin, Young-Mo Koo, Kwang Yoon Koh, Bong Ho Kim, Dong Jun Ahn | 2001-12-11 |
| 6015650 | Method for forming micro patterns of semiconductor devices | — | 2000-01-18 |
| 5989788 | Method for forming resist patterns having two photoresist layers and an intermediate layer | Ki Ho Baik | 1999-11-23 |
| 5925578 | Method for forming fine patterns of a semiconductor device | — | 1999-07-20 |
| 5905017 | Method for detecting microscopic differences in thickness of photoresist film coated on wafer | — | 1999-05-18 |
| 5902701 | Phase shift mask and method for fabricating the same | — | 1999-05-11 |
| 5902493 | Method for forming micro patterns of semiconductor devices | — | 1999-05-11 |
| 5882980 | Process of forming bipolar alignment mark for semiconductor | — | 1999-03-16 |
| 5870201 | Magnification measuring mark | — | 1999-02-09 |
| 5849438 | Phase shift mask and method for fabricating the same | — | 1998-12-15 |
| 5834161 | Method for fabricating word lines of a semiconductor device | — | 1998-11-10 |
| 5830624 | Method for forming resist patterns comprising two photoresist layers and an intermediate layer | Ki Ho Baik | 1998-11-03 |