Issued Patents All Time
Showing 76–94 of 94 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841838 | Microelectromechanical tunneling gyroscope and an assembly for making a microelectromechanical tunneling gyroscope therefrom | David T. Chang | 2005-01-11 |
| 6835587 | Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same | David T. Chang | 2004-12-28 |
| 6730978 | Single crystal, dual wafer, tunneling sensor and a method of making same | Michael J. Little, LeRoy H. Hackett | 2004-05-04 |
| 6698287 | Microgyro tuning using focused ion beams | Richard J. Joyce, Robert M'Closkey, A. Dorian Challoner | 2004-03-02 |
| 6674141 | Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same | David T. Chang | 2004-01-06 |
| 6630367 | Single crystal dual wafer, tunneling sensor and a method of making same | Michael J. Little, LeRoy H. Hackett | 2003-10-07 |
| 6580138 | Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same | David T. Chang | 2003-06-17 |
| 6563184 | Single crystal tunneling sensor or switch with silicon beam structure and a method of making same | David T. Chang | 2003-05-13 |
| 6555404 | Method of manufacturing a dual wafer tunneling gyroscope | David T. Chang | 2003-04-29 |
| 6238539 | Method of in-situ displacement/stress control in electroplating | Richard J. Joyce, Ronghua Wei, Robert E. Doty | 2001-05-29 |
| 6109105 | Tunneling-based rate gyros with simple drive and sense axis coupling | Gary M. Atkinson, Dorian Challoner, Wallace H. Sunada | 2000-08-29 |
| 5905202 | Tunneling rotation sensor | Gary M. Atkinson, Dorian Challoner, Wallace H. Sunada | 1999-05-18 |
| 5756895 | Tunneling-based rate gyros with simple drive and sense axis coupling | Gary M. Atkinson, Dorian Challoner, Wallace H. Sunada | 1998-05-26 |
| 5665253 | Method of manufacturing single-wafer tunneling sensor | Gary M. Atkinson | 1997-09-09 |
| 5596194 | Single-wafer tunneling sensor and low-cost IC manufacturing method | Gary M. Atkinson | 1997-01-21 |
| 5548129 | Quantum well structure with self-aligned gate and method of making the same | — | 1996-08-20 |
| 5489539 | Method of making quantum well structure with self-aligned gate | — | 1996-02-06 |
| 4908226 | Selective area nucleation and growth method for metal chemical vapor deposition using focused ion beams | Thomas Mayer | 1990-03-13 |
| 4785172 | Secondary ion mass spectrometry system and method for focused ion beam with parallel ion detection | John W. Reeds | 1988-11-15 |