Issued Patents All Time
Showing 51–75 of 94 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8151640 | MEMS on-chip inertial navigation system with error correction | — | 2012-04-10 |
| 8138016 | Large area integration of quartz resonators with electronics | David T. Chang | 2012-03-20 |
| 7994877 | MEMS-based quartz hybrid filters and a method of making the same | David T. Chang | 2011-08-09 |
| 7884930 | Integrated quartz biological sensor and method | Deborah J. Kirby | 2011-02-08 |
| 7851971 | Low frequency quartz based MEMS resonators and method of fabricating the same | David T. Chang, Frederic P. Stratton, Pamela R. Patterson | 2010-12-14 |
| 7830074 | Integrated quartz oscillator on an active electronic substrate | David T. Chang | 2010-11-09 |
| 7802356 | Method of fabricating an ultra thin quartz resonator component | David T. Chang, Pamela R. Patterson | 2010-09-28 |
| 7750535 | Quartz-based nanoresonator | David T. Chang, Jinsoo Kim | 2010-07-06 |
| 7671431 | Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects | Frederic P. Stratton, David T. Chang | 2010-03-02 |
| 7647688 | Method of fabricating a low frequency quartz resonator | David T. Chang, Frederic P. Stratton, Pamela R. Patterson | 2010-01-19 |
| 7581443 | Disc resonator gyroscopes | David T. Chang | 2009-09-01 |
| 7559130 | Method for fabricating quartz-based nanoresonators | David T. Chang, Jinsoo Kim | 2009-07-14 |
| 7555824 | Method for large scale integration of quartz-based devices | David T. Chang | 2009-07-07 |
| 7557677 | Cascaded monolithic crystal filter with high out-of-band rejection | Tsung-Yuan Hsu | 2009-07-07 |
| 7459099 | Quartz-based nanoresonators and method of fabricating same | David T. Chang, Jinsoo Kim | 2008-12-02 |
| 7282834 | Micro electrical mechanical system (MEMS) tuning using focused ion beams | Richard J. Joyce | 2007-10-16 |
| 7237315 | Method for fabricating a resonator | David T. Chang, Jinsoo Kim | 2007-07-03 |
| 7232700 | Integrated all-Si capacitive microgyro with vertical differential sense and control and process for preparing an integrated all-Si capacitive microgyro with vertical differential sense | — | 2007-06-19 |
| 7202100 | Method of manufacturing a cloverleaf microgyroscope and cloverleaf microgyroscope | Frederic P. Stratton, David T. Chang | 2007-04-10 |
| 7015060 | Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects | Frederic P. Stratton, David T. Chang | 2006-03-21 |
| 6982185 | Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same | David T. Chang | 2006-01-03 |
| 6975009 | Dual-wafer tunneling gyroscope and an assembly for making same | David T. Chang | 2005-12-13 |
| 6951768 | Single crystal, dual wafer, tunneling sensor or switch with substrate protrusion and a method of making same | David T. Chang | 2005-10-04 |
| 6933164 | Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials | — | 2005-08-23 |
| 6922118 | Micro electrical mechanical system (MEMS) tuning using focused ion beams | Richard J. Joyce | 2005-07-26 |