Issued Patents All Time
Showing 26–50 of 94 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10581402 | Integrated quartz MEMS tuning fork resonator/oscillator | — | 2020-03-03 |
| 10571267 | High stability angular sensor | Logan D. Sorenson, Raviv Perahia, David T. Chang, Deborah J. Kirby, Hung Nguyen +1 more | 2020-02-25 |
| 10444014 | High dynamic range gyroscope | Logan D. Sorenson, Raviv Perahia, David T. Chang, Deborah J. Kirby, Hung Nguyen +1 more | 2019-10-15 |
| 10389392 | High-Q quartz-based inductor array for antenna matching | Walter S. Wall | 2019-08-20 |
| 10266398 | ALD metal coatings for high Q MEMS structures | Richard J. Joyce | 2019-04-23 |
| 10177737 | High-Q quartz-based inductors for high power LF communication | Walter S. Wall | 2019-01-08 |
| 10141906 | High Q quartz-based MEMS resonators and method of fabricating same | David T. Chang, Frederic P. Stratton, Hung Nguyen | 2018-11-27 |
| 10110198 | Integrated quartz MEMS tuning fork resonator/oscillator | — | 2018-10-23 |
| 9991863 | Rounded and curved integrated tethers for quartz resonators | Deborah J. Kirby, David T. Chang | 2018-06-05 |
| 9985198 | High Q quartz-based MEMS resonators and methods of fabricating same | David T. Chang, Frederic P. Stratton, Hung Nguyen | 2018-05-29 |
| 9879997 | Quartz resonator with plasma etched tethers for stress isolation from the mounting contacts | Yook-Kong Yong, Deborah J. Kirby, David T. Chang | 2018-01-30 |
| 9250074 | Resonator assembly comprising a silicon resonator and a quartz resonator | David T. Chang | 2016-02-02 |
| 9046541 | Method for producing a disk resonator gyroscope | David T. Chang, Robert L. Larson | 2015-06-02 |
| 9038459 | Frequency locking of resonators for improved temperature control of gyroscopes | — | 2015-05-26 |
| 8994465 | Phase noise reduction control loop for oscillators using nonlinear resonator operation | Richard J. Joyce, Harris P. Moyer | 2015-03-31 |
| 8782876 | Method of manufacturing MEMS based quartz hybrid filters | David T. Chang | 2014-07-22 |
| 8769802 | Method of fabrication an ultra-thin quartz resonator | David T. Chang, Pamela R. Patterson | 2014-07-08 |
| 8765615 | Quartz-based MEMS resonators and methods of fabricating same | David T. Chang, Frederic P. Stratton, Hung Nguyen | 2014-07-01 |
| 8766745 | Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same | David T. Chang, Robert L. Larson | 2014-07-01 |
| 8593037 | Resonator with a fluid cavity therein | Tsung-Yuan Hsu | 2013-11-26 |
| 8569937 | Piezoelectric resonator with capacitive sense and/or force rebalance electrodes to control an amplitude of vibration | Yook-Kong Yong | 2013-10-29 |
| 8522612 | MEMS on-chip inertial navigation system with error correction | — | 2013-09-03 |
| 8402824 | Frequency locking of resonators for improved temperature control of gyroscopes | — | 2013-03-26 |
| 8305154 | Parametrically driven quartz UHF oscillator | Yook-Kong Yong | 2012-11-06 |
| 8176607 | Method of fabricating quartz resonators | Tsung-Yuan Hsu | 2012-05-15 |