Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730978 | Single crystal, dual wafer, tunneling sensor and a method of making same | Randall L. Kubena, Michael J. Little | 2004-05-04 |
| 6630367 | Single crystal dual wafer, tunneling sensor and a method of making same | Randall L. Kubena, Michael J. Little | 2003-10-07 |
| 6123985 | Method of fabricating a membrane-actuated charge controlled mirror (CCM) | William P. Robinson, Philip G. Reif | 2000-09-26 |
| 6087585 | Micro-dimensional coupling conductor | — | 2000-07-11 |
| 5663095 | Method of making a micro-dimensional coupling conductor | — | 1997-09-02 |
| 4906552 | Two layer dye photoresist process for sub-half micrometer resolution photolithography | Catherine Ngo | 1990-03-06 |