Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892708 | Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method | Atsushi Kawaguchi, Hiroyuki Akagawa, Akihiro Kawahara | 2011-02-22 |
| 7862960 | Manufacturing method of transparent substrate for mask blanks, manufacturing method of mask blanks, manufacturing method of exposure masks, manufacturing method of semiconductor devices, manufacturing method of liquid crystal display devices, and defect correction method of exposure masks | Masaru Mitsui | 2011-01-04 |
| 7745074 | Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method | Atsushi Kawaguchi, Hiroyuki Akagawa, Akihiro Kawahara | 2010-06-29 |
| 7700244 | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method | Osamu Suzuki, Hiroyuki Akagawa, Atsushi Kawaguchi, Naozumi Ishibashi | 2010-04-20 |
| 7592104 | Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method | Atsushi Kawaguchi, Hiroyuki Akagawa, Akihiro Kawahara | 2009-09-22 |
| 6861659 | Method of inspecting ununiformity of transparent material, apparatus therefor, and method of selecting transparent substrate | — | 2005-03-01 |
| 6683720 | Reflector, sidelight type backlighting apparatus and reflector substrate | Hirotaka Yoshida, Shin Fukuda, Hiroshi Ishikawa | 2004-01-27 |
| 6610994 | Method of checking unevenness of light-transmitting substance, apparatus therefor, and method of sorting transparent substrates | — | 2003-08-26 |
| 6593408 | Organic polymer/inorganic fine particle-dispersed aqueous solution having excellent stability and uses thereof | Toshihiko Takaki, Hiroshi Itoh, Toshiki Oyanagi | 2003-07-15 |
| 6555273 | Glass substrate for an electron device, photomask blank and photomask using the same | — | 2003-04-29 |
| 6359093 | Amphipathic compound having succinic acid skeleton | Toshihiko Takaki, Shoko Oyanagi | 2002-03-19 |
| 6057412 | Amphipathic compound having succinic acid skeleton | Toshihiko Takaki, Hiroshi Itoh, Masayuki Yanagi, Shoko Oyanagi, Hiroyoshi Watanabe | 2000-05-02 |
| 5872287 | Amphipathic compound having succinic acid skeleton | Toshihiko Takaki, Hiroshi Itoh, Masayuki Yanagi, Shoko Oyanagi, Hiroyoshi Watanabe +3 more | 1999-02-16 |
| 4205805 | Automatic tape windup means | Katsuyoshi Yokota, Masao Suzuki | 1980-06-03 |