Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910507 | Glass ceramic material for plasma display | Kazuhiro Nishikawa | 2011-03-22 |
| 7790627 | Semiconductor device, method of manufacturing the same, and method of manufacturing metal compound thin film | Kunihiko Iwamoto, Toshihide Nabatame, Tetsuji Yasuda | 2010-09-07 |
| 7772678 | Metallic compound thin film that contains high-k dielectric metal, nitrogen, and oxygen | Kunihiko Iwamoto, Toshihide Nabatame, Tomoaki Nishimura | 2010-08-10 |
| 7485189 | Thin film deposition device using an FTIR gas analyzer for mixed gas supply | Tsukasa Satake, Hiroshi Funakubo | 2009-02-03 |
| 7482234 | Method of fabricating a metal oxynitride thin film that includes a first annealing of a metal oxide film in a nitrogen-containing atmosphere to form a metal oxynitride film and a second annealing of the metal oxynitride film in an oxidizing atmosphere | Kunihiko Iwamoto, Toshihide Nabatame, Tomoaki Nishimura | 2009-01-27 |
| 7419920 | Metal thin film and semiconductor comprising a metal thin film | Kunihiko Iwamoto, Toshihide Nabatame | 2008-09-02 |
| 7397094 | Semiconductor device and manufacturing method thereof | Toshihide Nabatame, Akira Toriumi, Tsuyoshi Horikawa, Kunihiko Iwamoto | 2008-07-08 |
| 7387686 | Film formation apparatus | Kunihiko Iwamoto, Toshihide Nabatame, Tetsuji Yasuda | 2008-06-17 |
| 7372112 | Semiconductor device, process for producing the same and process for producing metal compound thin film | Kunihiko Iwamoto, Toshihide Nabatame, Tetsuji Yasuda | 2008-05-13 |
| 7348650 | Element having microstructure and manufacturing method thereof | Kazushi Mori, Mitsuaki Matsumoto, Atsushi Tajiri, Koutarou Furusawa | 2008-03-25 |
| 7129183 | Method of forming grating microstrutures by anodic oxidation | Kazushi Mori, Mitsuaki Matsumoto, Atsushi Tajiri, Koutarou Furusawa | 2006-10-31 |
| 7113316 | Holographic optical element, position shift detecting apparatus, optical pickup apparatus, optical recording medium drive and method of fabricating holographic optical element | Kazushi Mori, Mitsuaki Matsumoto, Atsushi Tajiri, Minoru Sawada | 2006-09-26 |
| 7046444 | Wave plate and optical device using the same | Kazushi Mori, Shingo Kameyama, Hitoshi Hirano, Koutarou Furusawa, Masayuki Shono | 2006-05-16 |
| 6967985 | Surface emission semiconductor laser device | Kazushi Mori, Atsushi Tajiri, Yasuhiko Nomura, Ryoji Hiroyama | 2005-11-22 |
| 6930053 | Method of forming grating microstructures by anodic oxidation | Kazushi Mori, Mitsuaki Matsumoto, Atsushi Tajiri, Koutarou Furusawa | 2005-08-16 |
| 6917454 | Holographic optical element, position shift detecting apparatus, optical pickup apparatus, optical recording medium drive and method of fabricating holographic optical element | Kazushi Mori, Mitsuaki Matsumoto, Atsushi Tajiri, Minoru Sawada | 2005-07-12 |
| 6875328 | pH sensor | Tsuyoshi Nakanishi, Hiroki Tanabe, Mitsuru Honjo | 2005-04-05 |
| 6734503 | Nitride-based semiconductor element | Masayuki Hata, Nobuhiko Hayashi, Yasuhiko Nomura, Tatsuya Kunisato, Hiroki Ohbo | 2004-05-11 |
| 6654397 | Semiconductor laser device and manufacturing method thereof | Kunio Takeuchi, Ryoji Hiroyama, Shigeyuki Okamoto, Yasuhiko Nomura, Daijiro Inoue | 2003-11-25 |
| 6425287 | Microflow sensor element and manufacturing method thereof | Shuji Takada, Koichi Matsumoto | 2002-07-30 |
| 6320192 | Detector for use in infrared analyzer, flow detector and manufacturing method thereof | Koichi Matsumoto, Shuji Takada | 2001-11-20 |