Issued Patents All Time
Showing 26–50 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7197949 | Meso sniffer: a device and method for active gas sampling using alternating flow | J. David Zook | 2007-04-03 |
| 7168675 | Media isolated electrostatically actuated valve | Eugen Cabuz, Tzu-Yu Wang | 2007-01-30 |
| 7061595 | Miniaturized flow controller with closed loop regulation | Eugen Cabuz, David Jonathan Zook | 2006-06-13 |
| 7000452 | Phased micro fluid analyzer | Ulrich Bonne, Robert E. Higashi | 2006-02-21 |
| 6968862 | Electrostatically actuated valve | Eugen Cabuz | 2005-11-29 |
| 6969425 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Max C. Glenn, Francis M. Erdmann, Robert D. Horning | 2005-11-29 |
| 6946200 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Max C. Glenn, Francis M. Erdmann, Robert D. Horning | 2005-09-20 |
| 6889567 | 3D array integrated cells for the sampling and detection of air bound chemical and biological species | — | 2005-05-10 |
| 6837476 | Electrostatically actuated valve | Eugen Cabuz | 2005-01-04 |
| 6808956 | Thin micromachined structures | Jeffrey A. Ridley | 2004-10-26 |
| 6794981 | Integratable-fluid flow and property microsensor assembly | Aravind Padmanabhan, Jay Schwichtenberg, Ernest Satren | 2004-09-21 |
| 6767190 | Methods of operating an electrostatically actuated pump | Eugen Cabuz | 2004-07-27 |
| 6758107 | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species | — | 2004-07-06 |
| 6729856 | Electrostatically actuated pump with elastic restoring forces | Eugen Cabuz | 2004-05-04 |
| 6597438 | Portable flow cytometry | J. David Zook, James Allen Cox, Thomas Ohnstein, Ulrich Bonne, Eugen Cabuz +3 more | 2003-07-22 |
| 6582985 | SOI/glass process for forming thin silicon micromachined structures | Jeffrey A. Ridley | 2003-06-24 |
| 6568286 | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species | — | 2003-05-27 |
| 6549275 | Optical detection system for flow cytometry | J. David Zook, James Allen Cox, Aravind Padmanabhan, Teresa M. Marta | 2003-04-15 |
| 6544655 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Max C. Glenn, Francis M. Erdmann, Robert D. Horning | 2003-04-08 |
| 6432721 | Meso sniffer: a device and method for active gas sampling using alternating flow | J. David Zook | 2002-08-13 |
| 6382228 | Fluid driving system for flow cytometry | J. David Zook, Thomas Ohnstein, Ulrich Bonne, Eugen Cabuz, Ernest Satren | 2002-05-07 |
| 6358021 | Electrostatic actuators for active surfaces | — | 2002-03-19 |
| 6351054 | Compounded AC driving signal for increased reliability and lifetime in touch-mode electrostatic actuators | Eugen Cabuz | 2002-02-26 |
| 6288472 | Electrostatic/pneumatic actuators for active surfaces | Thomas Ohnstein, Michael Ray Elgersma | 2001-09-11 |
| 6255758 | Polymer microactuator array with macroscopic force and displacement | Robert D. Horning, William R. Herb | 2001-07-03 |