| 9476712 |
MEMS device mechanism enhancement for robust operation through severe shock and acceleration |
Timothy J. Hanson, Mark W. Weber, Drew A. Karnick |
2016-10-25 |
| 8614491 |
Package interface plate for package isolation structures |
— |
2013-12-24 |
| 8011247 |
Multistage proof-mass movement deceleration within MEMS structures |
— |
2011-09-06 |
| 7977786 |
Saw debris reduction in MEMS devices |
Jeff A. Ridley, James C. Nohava, Robert D. Horning, Jane Rekstad |
2011-07-12 |
| 7800190 |
Getter on die in an upper sense plate designed system |
Bryan R. Seppala, Jon DCamp |
2010-09-21 |
| 7314777 |
Chip packaging systems and methods |
Jon DCamp, Harlan L. Curtis, Lori Dunaway |
2008-01-01 |
| 7297573 |
Methods and apparatus for particle reduction in MEMS devices |
Jon DCamp, Harlan L. Curtis, Lori Dunaway |
2007-11-20 |
| 7074636 |
Methods and apparatus for attaching getters to MEMS device housings |
Harlan L. Curtis, Jon DCamp, Lori Dunaway |
2006-07-11 |
| 7037805 |
Methods and apparatus for attaching a die to a substrate |
Jon DCamp, Harlan L. Curtis, Lori Dunaway |
2006-05-02 |
| 6987304 |
Methods and apparatus for particle reduction in MEMS devices |
Jon DCamp, Harlan L. Curtis, Lori Dunaway |
2006-01-17 |
| 6978673 |
Methods and systems for simultaneously fabricating multi-frequency MEMS devices |
Burgess R. Johnson, William P. Platt, David K. Arch, Mark W. Weber |
2005-12-27 |
| 6969425 |
Methods for reducing the curvature in boron-doped silicon micromachined structures |
Cleopatra Cabuz, Francis M. Erdmann, Robert D. Horning |
2005-11-29 |
| 6946200 |
Methods for reducing the curvature in boron-doped silicon micromachined structures |
Cleopatra Cabuz, Francis M. Erdmann, Robert D. Horning |
2005-09-20 |
| 6927098 |
Methods and apparatus for attaching MEMS devices to housing |
Jon DCamp, Harlan L. Curtis, Lori Dunaway |
2005-08-09 |
| 6914323 |
Methods and apparatus for attaching getters to MEMS device housings |
Harlan L. Curtis, Jon DCamp, Lori Dunaway |
2005-07-05 |
| 6865944 |
Methods and systems for decelerating proof mass movements within MEMS structures |
Mark W. Weber, William P. Platt |
2005-03-15 |
| 6782748 |
High-G acceleration protection by caging |
Mark W. Weber, William A. Harris |
2004-08-31 |
| 6544655 |
Methods for reducing the curvature in boron-doped silicon micromachined structures |
Cleopatra Cabuz, Francis M. Erdmann, Robert D. Horning |
2003-04-08 |
| 6041659 |
Methods and apparatus for sensing differential and gauge static pressure in a fluid flow line |
Douglas W. Wilda, James V. Davidson, Thomas P. Overholt, Raymond F. McMullen |
2000-03-28 |
| 5714690 |
Piezoresistive silicon pressure sensor manufacture implementing long diaphragms with large aspect ratios |
David William Burns |
1998-02-03 |
| 5485753 |
Piezoresistive silicon pressure sensor implementing long diaphragms with large aspect ratios |
David William Burns |
1996-01-23 |
| 4891985 |
Force sensor with attached mass |
— |
1990-01-09 |
| 4855544 |
Multiple level miniature electromechanical accelerometer switch |
— |
1989-08-08 |
| 4763098 |
Flip-chip pressure transducer |
Raymond F. McMullen |
1988-08-09 |
| 4665754 |
Pressure transducer |
Raymond F. McMullen, David B. Wamstad |
1987-05-19 |