Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10371521 | Systems and methods for a four-mass vibrating MEMS structure | — | 2019-08-06 |
| 9837935 | All-silicon electrode capacitive transducer on a glass substrate | Ryan Supino | 2017-12-05 |
| 9534925 | Hemitoroidal resonator gyroscope | Robert D. Horning, Robert Compton, Eugen Cabuz | 2017-01-03 |
| 9061891 | Two degree of freedom dithering platform for MEMS sensor calibration | Ryan Supino, Eugen Cabuz, Robert D. Horning | 2015-06-23 |
| 8887550 | Two degree of freedom dithering platform for MEMS sensor calibration | Ryan Supino, Eugen Cabuz, Robert D. Horning | 2014-11-18 |
| 8847143 | Systems and methods for an encoder and control scheme | Eugen Cabuz, Robert D. Horning, Ryan Supino | 2014-09-30 |
| 8664951 | MEMS gyroscope magnetic sensitivity reduction | Bharat B. Pant | 2014-03-04 |
| 8631702 | Hemitoroidal resonator gyroscope | Robert D. Horning, Robert Compton, Eugen Cabuz | 2014-01-21 |
| 8146424 | Systems and methods for an inertial sensor suspension that minimizes proof mass rotation | Jonathan Engel | 2012-04-03 |
| 8037757 | Parametric amplification of a MEMS gyroscope by capacitance modulation | — | 2011-10-18 |
| 7971483 | Systems and methods for acceleration and rotational determination from an out-of-plane MEMS device | Ryan Supino | 2011-07-05 |
| 7444869 | Force rebalancing and parametric amplification of MEMS inertial sensors | Eugen Cabuz | 2008-11-04 |
| 7444868 | Force rebalancing for MEMS inertial sensors using time-varying voltages | — | 2008-11-04 |
| 7258010 | MEMS device with thinned comb fingers | Robert D. Horning, Mark W. Weber | 2007-08-21 |
| 7036373 | MEMS gyroscope with horizontally oriented drive electrodes | Mark W. Weber | 2006-05-02 |
| 6978673 | Methods and systems for simultaneously fabricating multi-frequency MEMS devices | Max C. Glenn, William P. Platt, David K. Arch, Mark W. Weber | 2005-12-27 |
| 6860151 | Methods and systems for controlling movement within MEMS structures | William P. Platt | 2005-03-01 |
| 6715353 | MEMS gyroscope with parametric gain | — | 2004-04-06 |
| 6684469 | Method for forming an actuator array device | Robert D. Horning | 2004-02-03 |
| 6646364 | MEMS actuator with lower power consumption and lower cost simplified fabrication | Robert D. Horning | 2003-11-11 |
| 6498557 | Three-dimensional micro-coils in planar substrates | — | 2002-12-24 |
| 6495865 | Microcathode with integrated extractor | Barrett E. Cole, Robert D. Horning, Ulrich Bonne | 2002-12-17 |
| 6487864 | Cyrogenic inertial micro-electro-mechanical system (MEMS) device | William P. Platt | 2002-12-03 |
| 6445271 | Three-dimensional micro-coils in planar substrates | — | 2002-09-03 |
| 6397793 | Microcombustion engine/generator | Wei Yang, Ulrich Bonne | 2002-06-04 |