Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4724060 | Sputtering apparatus with film forming directivity | Masao Sakata, Shigeru Kobayashi, Tsuneyoshi Kawahito, Tsuneaki Kamei, Katsuo Abe | 1988-02-09 |
| 4610774 | Target for sputtering | Masao Sakata, Shigeru Kobayashi, Katsuo Abe, Tsuneaki Kamei, Osamu Kasahara +2 more | 1986-09-09 |
| 4610770 | Method and apparatus for sputtering | Hiroshi Saito, Hideki Tateishi, Shigeru Kobayashi, Susumu Aiuchi, Yasumichi Suzuki +2 more | 1986-09-09 |