Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5917211 | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Jun Murata, Yoshitaka Tadaki, Hiroko Kaneko, Toshihiro Sekiguchi, Hiroyuki Uchiyama +15 more | 1999-06-29 |
| 5734188 | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Jun Murata, Yoshitaka Tadaki, Hiroko Kaneko, Toshihiro Sekiguchi, Hiroyuki Uchiyama +15 more | 1998-03-31 |
| 5264712 | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Jun Murata, Yoshitaka Tadaki, Hiroko Kaneko, Toshihiro Sekiguchi, Hiroyuki Uchiyama +15 more | 1993-11-23 |
| 4835089 | Resist pattern forming process with dry etching | Takao Iwayanagi, Norio Hasegawa, Toshihiko Tanaka, Hiroshi Shiraishi, Takumi Ueno +2 more | 1989-05-30 |
| 4738910 | Method of applying a resist | Tetsuo Ito, Masaya Tanuma, Yoshiyuki Nakagomi, Kazunari Kobayashi | 1988-04-19 |