Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9281200 | Enhanced patterning uniformity of gate electrodes of a semiconductor device by late gate doping | Hans-Juergen Thees, Sven Beyer, Martin Mazur | 2016-03-08 |
| 8728924 | Gate electrodes of a semiconductor device formed by a hard mask and double exposure in combination with a shrink spacer | Sven Beyer, Andreas Hellmich, Klaus Gebauer | 2014-05-20 |
| 8133814 | Etch methods for semiconductor device fabrication | Gunter Grasshoff | 2012-03-13 |