Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7037777 | Process for producing an etching mask on a microstructure, in particular a semiconductor structure with trench capacitors, and corresponding use of the etching mask | Momtchil Stavrev, Mirko Vogt, Stephan Wege | 2006-05-02 |
| 6964912 | Method for fabricating a semiconductor structure | Dirk Efferenn | 2005-11-15 |
| 6932916 | Semiconductor substrate with trenches of varying depth | Dirk Manger, Till Schloesser | 2005-08-23 |
| 6924209 | Method for fabricating an integrated semiconductor component | Alexander Trueby, Andreas Wich-Glasen | 2005-08-02 |
| 6916721 | Method for fabricating a trench capacitor with an insulation collar | Lars Heineck, Stephan Kudelka, Jorn Lutzen, Martin Popp, Till Schlosser +1 more | 2005-07-12 |
| 6770530 | Method for producing a shallow trench isolation for n- and p-channel field-effect transistors in a semiconductor module | Dirk Efferenn, Andreas Wich-Glasen | 2004-08-03 |
| 6716720 | Method for filling depressions on a semiconductor wafer | Dirk Efferenn | 2004-04-06 |
| 6586308 | Method for producing circuit structures on a semiconductor substrate and semiconductor configuration with functional circuit structures and dummy circuit structures | Sabine Kling, Dominique Savignac, Henning Haffner, Elke Hietschold, Ines Anke | 2003-07-01 |