Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398469 | Methods and systems for producing conformal thin films | Barry C. Arkles | 2025-08-26 |
| 12378666 | Silicon carbide thin films and vapor deposition methods thereof | Barry C. Arkles | 2025-08-05 |
| 12344934 | Silicon-based thin films from N-alkyl substituted perhydridocyclotrisilazanes | Barry C. Arkles | 2025-07-01 |
| 12065737 | Silicon-based thin films from N-alkyl substituted perhydridocyclotrisilazanes | Barry C. Arkles | 2024-08-20 |
| 11987882 | Silicon carbide thin films and vapor deposition methods thereof | Barry C. Arkles | 2024-05-21 |
| 11634811 | Process for thin film deposition through controlled formation of vapor phase transient species | Barry C. Arkles | 2023-04-25 |
| 11248291 | Process for thin film deposition through controlled formation of vapor phase transient species | Barry C. Arkles | 2022-02-15 |
| 10961624 | Process for pulsed thin film deposition | Barry C. Arkles | 2021-03-30 |
| 6884466 | Process for low-temperature metal-organic chemical vapor deposition of tungsten nitride and tungsten nitride films | Barry C. Arkles | 2005-04-26 |
| 6586056 | Silicon based films formed from iodosilane precursors and method of making the same | Barry C. Arkles | 2003-07-01 |
| 6534133 | Methodology for in-situ doping of aluminum coatings | Andres Emaranza Knorr, Jonathan E. Faltermeier | 2003-03-18 |
| 6346477 | Method of interlayer mediated epitaxy of cobalt silicide from low temperature chemical vapor deposition of cobalt | Ana R. Londergan, Barry C. Arkles | 2002-02-12 |
| 6139922 | Tantalum and tantalum-based films formed using fluorine-containing source precursors and methods of making the same | Barry C. Arkles | 2000-10-31 |
| 6099903 | MOCVD processes using precursors based on organometalloid ligands | John T. Welch, Paul J. Toscano, Rolf Claessen, Andrei Kornilov, Kulbinder Kumar Banger | 2000-08-08 |
| 6090709 | Methods for chemical vapor deposition and preparation of conformal titanium-based films | Barry C. Arkles | 2000-07-18 |
| 6077571 | Conformal pure and doped aluminum coatings and a methodology and apparatus for their preparation | Jonathan E. Faltermeier | 2000-06-20 |
| 6066196 | Method for the chemical vapor deposition of copper-based films and copper source precursors for the same | Barry C. Arkles | 2000-05-23 |
| 6037001 | Method for the chemical vapor deposition of copper-based films | Barry C. Arkles | 2000-03-14 |
| 5968611 | Silicon nitrogen-based films and method of making the same | Barry C. Arkles | 1999-10-19 |
| 5919531 | Tantalum and tantalum-based films and methods of making the same | Barry C. Arkles | 1999-07-06 |
| 5376409 | Process and apparatus for the use of solid precursor sources in liquid form for vapor deposition of materials | Eric Eisenbraun, Bo Zheng | 1994-12-27 |