Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7808106 | Nano-laminate difussion barrier for direct electrochemical deposition copper | — | 2010-10-05 |
| 5376409 | Process and apparatus for the use of solid precursor sources in liquid form for vapor deposition of materials | Alain E. Kaloyeros, Bo Zheng | 1994-12-27 |