Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6346032 | Fluid dispensing fixed abrasive polishing pad | Andrew J. Black, Landon B. Vines | 2002-02-12 |
| 6341998 | Integrated circuit (IC) plating deposition system and method | — | 2002-01-29 |
| 6315645 | Patterned polishing pad for use in chemical mechanical polishing of semiconductor wafers | Milind Weling | 2001-11-13 |
| 6196900 | Ultrasonic transducer slurry dispenser | Samuel V. Dunton, Milind Weling | 2001-03-06 |
| 6165956 | Methods and apparatus for cleaning semiconductor substrates after polishing of copper film | Yuexing Zhao, Diane Hymes, Wilbur C. Krusell | 2000-12-26 |
| 6162301 | Methods and apparatus for cleaning semiconductor substrates after polishing of copper film | Yuexing Zhao, Diane Hymes, Wilbur C. Krusell | 2000-12-19 |
| 6159075 | Method and system for in-situ optimization for semiconductor wafers in a chemical mechanical polishing process | — | 2000-12-12 |