Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE36224 | Microwave plasma processing process and apparatus | Shuzo Fujimura, Toshimasa Kisa | 1999-06-08 |
| 5364519 | Microwave plasma processing process and apparatus | Shuzo Fujimura, Toshimasa Kisa | 1994-11-15 |
| 4987284 | Downstream microwave plasma processing apparatus having an improved coupling structure between microwave plasma | Shuzo Fujimura, Satoru Mihara, Toshimasa Kisa | 1991-01-22 |
| 4938839 | Method of removing photoresist on a semiconductor wafer | Shuzo Fujimura, Yoshikazu Kato | 1990-07-03 |
| 4637146 | Spin dryer | Yuji Ohkuma | 1987-01-20 |