Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5429642 | Method for transferring wafers from one processing station to another sequentially and system therefor | — | 1995-07-04 |
| 5380684 | Method for transferring wafers from one processing station to another sequentially and system therefor | — | 1995-01-10 |
| 4637146 | Spin dryer | Yasunari Motoki | 1987-01-20 |
| 4557785 | Apparatus for wet processing | — | 1985-12-10 |