Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE36224 | Microwave plasma processing process and apparatus | Shuzo Fujimura, Yasunari Motoki | 1999-06-08 |
| 5364519 | Microwave plasma processing process and apparatus | Shuzo Fujimura, Yasunari Motoki | 1994-11-15 |
| 4987284 | Downstream microwave plasma processing apparatus having an improved coupling structure between microwave plasma | Shuzo Fujimura, Satoru Mihara, Yasunari Motoki | 1991-01-22 |
| 4738748 | Plasma processor and method for IC fabrication | — | 1988-04-19 |