Issued Patents All Time
Showing 51–58 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6186171 | Pneumatically driven liquid supply apparatus | Hiroshi Tanaka, Yasuhiro Chouno, Takashi Terada | 2001-02-13 |
| 6131588 | Apparatus for and method of cleaning object to be processed | Yuji Kamikawa, Kinya Ueno | 2000-10-17 |
| 6119367 | System for drying semiconductor wafers using ultrasonic or low frequency vibration | Yuji Kamikawa | 2000-09-19 |
| 6115867 | Apparatus for cleaning both sides of substrate | Takanori Miyazaki, Hiroki Taniyama, Toshikazu Arihisa | 2000-09-12 |
| 6050275 | Apparatus for and method of cleaning objects to be processed | Yuji Kamikawa, Kinya Ueno | 2000-04-18 |
| 6045624 | Apparatus for and method of cleaning objects to be processed | Yuji Kamikawa, Kinya Ueno | 2000-04-04 |
| 5510176 | Polytetrafluoroethylene porous film | Atsushi Nakamura | 1996-04-23 |
| 5358678 | Polytetrafluoroethylene porous film and process for preparing the same | Atsushi Nakamura | 1994-10-25 |