Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8753802 | Pattern forming method, chemical amplification resist composition and resist film | Keita Kato, Shinji Tarutani, Sou Kamimura, Kaoru Iwato | 2014-06-17 |
| 8663907 | Method of forming pattern | Keita Kato, Sou Kamimura, Kaoru Iwato, Shohei Kataoka, Shoichi SAITOH | 2014-03-04 |