Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892722 | Pattern forming method | Haruki Inabe, Shinichi Kanna | 2011-02-22 |
| 7842452 | Pattern forming method | Shinichi Kanna, Haruki Inabe | 2010-11-30 |
| 7811740 | Positive resist composition and pattern-forming method using the same | Fumiyuki Nishiyama | 2010-10-12 |
| 7803511 | Positive resist composition for immersion exposure and pattern-forming method using the same | Haruki Inabe, Kunihiko Kodama | 2010-09-28 |
| 7790351 | Positive resist composition and pattern making method using the same | Toshiaki Fukuhara, Shinichi Kanna | 2010-09-07 |
| 7785767 | Positive resist composition and pattern forming method using the same | — | 2010-08-31 |
| 7771912 | Positive resist composition and pattern forming method using the same | Kei Yamamoto, Shinichi Kanna | 2010-08-10 |
| 7700260 | Pattern forming method | Shinichi Kanna, Haruki Inabe | 2010-04-20 |
| 7666574 | Positive resist composition and pattern forming method | Toshiaki Fukuhara, Shinichi Kanna | 2010-02-23 |
| 7645557 | Positive resist composition for immersion exposure and pattern forming method using the same | Kazuyoshi Mizutani, Haruki Inabe | 2010-01-12 |
| 7635554 | Positive resist composition and pattern forming method | Toshiaki Fukuhara, Shinichi Kanna | 2009-12-22 |
| 7611820 | Positive resist composition and pattern-forming method using the same | Shinichi Kanna, Haruki Inabe | 2009-11-03 |
| 7550250 | Positive resist composition and pattern forming method using the same | — | 2009-06-23 |
| 7531287 | Positive type resist composition for use in liquid immersion exposure and a method of forming the pattern using the same | Haruki Inabe | 2009-05-12 |
| 7504194 | Positive resist composition and pattern making method using the same | Toshiaki Fukuhara, Shinichi Kanna | 2009-03-17 |
| 7482112 | Pattern forming method | Shinichi Kanna, Haruki Inabe | 2009-01-27 |
| 7368220 | Positive resist composition and pattern forming method using the same | Shinichi Kanna | 2008-05-06 |
| 7316886 | Protective film-forming composition for immersion exposure and pattern-forming method using the same | — | 2008-01-08 |
| 7273690 | Positive resist composition for immersion exposure and method of pattern formation with the same | Kunihiko Kodama | 2007-09-25 |
| 6020612 | Semiconductor integrated circuit having efficient layout of wiring lines | Takahiro Sawamura, Toshiya Uchida | 2000-02-01 |