| 7985122 |
Method of polishing a layer using a polishing pad |
— |
2011-07-26 |
| 7892070 |
Process of using a polishing apparatus including a platen window and a polishing pad |
Stephen F. Abraham, Alex P. Pamatat |
2011-02-22 |
| 7534162 |
Grooved platen with channels or pathway to ambient air |
Stephen F. Abraham, Alex P. Pamatat |
2009-05-19 |
| 7520797 |
Platen endpoint window with pressure relief |
Stephen F. Abraham, Alex P. Pamatat |
2009-04-21 |
| 7497763 |
Polishing pad, a polishing apparatus, and a process for using the polishing pad |
Stephen F. Abraham, Alex P. Pamatat |
2009-03-03 |
| 7179151 |
Polishing pad, a polishing apparatus, and a process for using the polishing pad |
Stephen F. Abraham, Alex P. Pamatat |
2007-02-20 |
| 7074118 |
Polishing carrier head with a modified pressure profile |
Keven A. Cline, Alex P. Pamatat, Nathan R. Brown |
2006-07-11 |
| 6905392 |
Polishing system having a carrier head with substrate presence sensing |
Keven A. Cline, Morris S. Poteet |
2005-06-14 |
| 6887138 |
Chemical mechanical polish (CMP) conditioning-disk holder |
Larry J. Bustos, Martin Cain, Nathan R. Brown |
2005-05-03 |