Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892070 | Process of using a polishing apparatus including a platen window and a polishing pad | Brian E. Bottema, Alex P. Pamatat | 2011-02-22 |
| 7534162 | Grooved platen with channels or pathway to ambient air | Brian E. Bottema, Alex P. Pamatat | 2009-05-19 |
| 7520797 | Platen endpoint window with pressure relief | Brian E. Bottema, Alex P. Pamatat | 2009-04-21 |
| 7497763 | Polishing pad, a polishing apparatus, and a process for using the polishing pad | Brian E. Bottema, Alex P. Pamatat | 2009-03-03 |
| 7179151 | Polishing pad, a polishing apparatus, and a process for using the polishing pad | Brian E. Bottema, Alex P. Pamatat | 2007-02-20 |