Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7074118 | Polishing carrier head with a modified pressure profile | Brian E. Bottema, Alex P. Pamatat, Nathan R. Brown | 2006-07-11 |
| 6905392 | Polishing system having a carrier head with substrate presence sensing | Brian E. Bottema, Morris S. Poteet | 2005-06-14 |