Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900137 | Dry etch process to edit copper lines | Steven B. Herschbein, Ville S. Kiiskinen, Carmelo F. Scrudato, Michael Sievers | 2005-05-31 |
| 6843893 | Metal dry etch using electronic field | Steven B. Herschbein, Herschel M. Marchman, Michael Sievers | 2005-01-18 |