| 8051799 |
Object-processing apparatus controlling production of particles in electric field or magnetic field |
Natsuko Ito, Fumihiko Uesugi |
2011-11-08 |
| 7974067 |
Plasma processing apparatus and method of suppressing abnormal discharge therein |
Natsuko Ito, Mitsuo Yasaka, Fumihiko Uesugi |
2011-07-05 |
| 7385195 |
Semiconductor device tester |
Keizo Yamada, Takeo Ushiki, Tohru Tsujide |
2008-06-10 |
| 7321805 |
Production managing system of semiconductor device |
Keizo Yamada, Takeo Ushiki, Tohru Tsujide |
2008-01-22 |
| 7002361 |
Film thickness measuring apparatus and a method for measuring a thickness of a film |
Keizo Yamada, Takeo Ushiki |
2006-02-21 |
| 6975125 |
Semiconductor device tester |
Keizo Yamada, Takeo Ushiki, Tohru Tsujide |
2005-12-13 |
| 6946857 |
Semiconductor device tester |
Keizo Yamada, Takeo Ushiki, Tohru Tsujide |
2005-09-20 |
| 6850079 |
Film thickness measuring apparatus and a method for measuring a thickness of a film |
Keizo Yamada, Takeo Ushiki |
2005-02-01 |
| 6842663 |
Production managing system of semiconductor device |
Keizo Yamada, Takeo Ushiki, Tohru Tsujide |
2005-01-11 |
| 6837936 |
Semiconductor manufacturing device |
Takeo Ushiki, Keizo Yamada |
2005-01-04 |
| 6768324 |
Semiconductor device tester which measures information related to a structure of a sample in a depth direction |
Keizo Yamada, Tohru Tsujide, Takeo Ushiki |
2004-07-27 |
| 6711453 |
Production managing system of semiconductor device |
Keizo Yamada, Takeo Ushiki, Tohru Tsujide |
2004-03-23 |
| 6614244 |
Semiconductor device inspecting apparatus |
Keizo Yamada, Takeo Ushiki, Tohru Tsujide |
2003-09-02 |
| 6559662 |
Semiconductor device tester and semiconductor device test method |
Keizo Yamada, Takeo Ushiki, Tohru Tsujide |
2003-05-06 |