Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7974067 | Plasma processing apparatus and method of suppressing abnormal discharge therein | Natsuko Ito, Fumihiko Uesugi, Yousuke Itagaki | 2011-07-05 |
| 6753499 | Method and apparatus for detecting anomalous discharge in plasma processing equipment using weakly-ionized thermal non-equilibrium plasma | Masayoshi Takeshita | 2004-06-22 |