Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7027226 | Diffractive optical element for extreme ultraviolet wavefront control | Kenneth Alan Goldberg | 2006-04-11 |
| 7016030 | Extended surface parallel coating inspection method | — | 2006-03-21 |
| 6927887 | Holographic illuminator for synchrotron-based projection lithography systems | — | 2005-08-09 |
| 6861273 | Method of fabricating reflection-mode EUV diffusers | Erik Anderson | 2005-03-01 |
| 6859263 | Apparatus for generating partially coherent radiation | — | 2005-02-22 |
| 6798494 | Apparatus for generating partially coherent radiation | — | 2004-09-28 |
| 6768567 | Synchrotron-based EUV lithography illuminator simulator | — | 2004-07-27 |
| 6738135 | System for inspecting EUV lithography masks | James H. Underwood, Rupert C. C. Perera | 2004-05-18 |
| 6707560 | Dual-domain lateral shearing interferometer | Kenneth Alan Goldberg | 2004-03-16 |
| 6573997 | Hybrid shearing and phase-shifting point diffraction interferometer | Kenneth Alan Goldberg | 2003-06-03 |
| 6559952 | System for interferometric distortion measurements that define an optical path | Jeffrey Bokor | 2003-05-06 |
| 6392792 | Method of fabricating reflection-mode EUV diffraction elements | — | 2002-05-21 |
| 6327102 | Miniature self-contained vacuum compatible electronic imaging microscope | Phillip J. Batson, Paul E. Denham, Michael S. Jones | 2001-12-04 |
| 6266147 | Phase-shifting point diffraction interferometer phase grating designs | — | 2001-07-24 |
| 6233056 | Interferometric at-wavelength flare characterization of EUV optical systems | Kenneth Alan Goldberg | 2001-05-15 |
| 6195169 | Phase-shifting point diffraction interferometer grating designs | Kenneth Alan Goldberg, Edita Tejnil | 2001-02-27 |
| 6151115 | Phase-shifting point diffraction interferometer focus-aid enhanced mask | — | 2000-11-21 |
| 6118535 | In Situ alignment system for phase-shifting point-diffraction interferometry | Kenneth Alan Goldberg | 2000-09-12 |
| 6111646 | Null test fourier domain alignment technique for phase-shifting point diffraction interferometer | Kenneth Alan Goldberg | 2000-08-29 |
| 6100978 | Dual-domain point diffraction interferometer | Kenneth Alan Goldberg | 2000-08-08 |