Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8569678 | Micron-scale lens array having diffracting structures | — | 2013-10-29 |
| 7027226 | Diffractive optical element for extreme ultraviolet wavefront control | Patrick P. Naulleau | 2006-04-11 |
| 6963395 | Method and apparatus for inspecting an EUV mask blank | — | 2005-11-08 |
| 6707560 | Dual-domain lateral shearing interferometer | Patrick P. Naulleau | 2004-03-16 |
| 6573997 | Hybrid shearing and phase-shifting point diffraction interferometer | Patrick P. Naulleau | 2003-06-03 |
| 6341183 | Graphical user interface for image acquisition and processing | — | 2002-01-22 |
| 6307635 | Phase-shifting point diffraction interferometer mask designs | — | 2001-10-23 |
| 6239878 | Fourier-transform and global contrast interferometer alignment methods | — | 2001-05-29 |
| 6233056 | Interferometric at-wavelength flare characterization of EUV optical systems | Patrick P. Naulleau | 2001-05-15 |
| 6195169 | Phase-shifting point diffraction interferometer grating designs | Patrick P. Naulleau, Edita Tejnil | 2001-02-27 |
| 6118535 | In Situ alignment system for phase-shifting point-diffraction interferometry | Patrick P. Naulleau | 2000-09-12 |
| 6111646 | Null test fourier domain alignment technique for phase-shifting point diffraction interferometer | Patrick P. Naulleau | 2000-08-29 |
| 6100978 | Dual-domain point diffraction interferometer | Patrick P. Naulleau | 2000-08-08 |